Khairallah, Y., Khonsari-Arefi, F. and Amouroux, J.. "Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets"
Pure and Applied Chemistry, vol. 66, no. 6, 1994, pp. 1353-1362.
https://doi.org/10.1351/pac199466061353
Khairallah, Y., Khonsari-Arefi, F. & Amouroux, J. (1994). Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets.
Pure and Applied Chemistry,
66(6), 1353-1362.
https://doi.org/10.1351/pac199466061353
Khairallah, Y., Khonsari-Arefi, F. and Amouroux, J. (1994) Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets. Pure and Applied Chemistry, Vol. 66 (Issue 6), pp. 1353-1362.
https://doi.org/10.1351/pac199466061353
Khairallah, Y., Khonsari-Arefi, F. and Amouroux, J.. "Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets"
Pure and Applied Chemistry 66, no. 6 (1994): 1353-1362.
https://doi.org/10.1351/pac199466061353
Khairallah Y, Khonsari-Arefi F, Amouroux J. Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets.
Pure and Applied Chemistry. 1994;66(6): 1353-1362.
https://doi.org/10.1351/pac199466061353
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