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Open Physics

formerly Central European Journal of Physics

Editor-in-Chief: Seidel, Sally

Managing Editor: Lesna-Szreter, Paulina

1 Issue per year


IMPACT FACTOR 2016 (Open Physics): 0.745
IMPACT FACTOR 2016 (Central European Journal of Physics): 0.765

CiteScore 2017: 0.83

SCImago Journal Rank (SJR) 2017: 0.241
Source Normalized Impact per Paper (SNIP) 2017: 0.537

Open Access
Online
ISSN
2391-5471
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Volume 10, Issue 1

Issues

Volume 13 (2015)

Multiaxis interferometric displacement measurement for local probe microscopy

Josef Lazar / Jan Hrabina / Mojmír Šerý / Petr Klapetek / Ondřej Číp
Published Online: 2011-12-03 | DOI: https://doi.org/10.2478/s11534-011-0093-5

Abstract

We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

Keywords: interferometry; nanometrology; microscopy

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About the article

Published Online: 2011-12-03

Published in Print: 2012-02-01


Citation Information: Open Physics, Volume 10, Issue 1, Pages 225–231, ISSN (Online) 2391-5471, DOI: https://doi.org/10.2478/s11534-011-0093-5.

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© 2011 Versita Warsaw. This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License. BY-NC-ND 3.0

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