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tm - Technisches Messen

Plattform für Methoden, Systeme und Anwendungen der Messtechnik

[TM - Technical Measurement: A Platform for Methods, Systems, and Applications of Measurement Technology

Editor-in-Chief: Puente León, Fernando / Zagar, Bernhard

IMPACT FACTOR 2017: 0.476

CiteScore 2017: 0.46

SCImago Journal Rank (SJR) 2017: 0.239
Source Normalized Impact per Paper (SNIP) 2017: 0.566

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Numerical Offset Optimization of Magnetic Field Sensor Microsystems (Numerische Offsetverminderung in Magnetfeld-Mikrosensoren)

J.G. Korvink / A. Greiner / J. Lienemann
Published Online: 2009-09-25 | DOI: https://doi.org/10.1524/teme.2001.68.6.298

This paper rewievs the modeling of magnetic field sensor microsystems with respect to the origins of offsets. We cover the modeling of silicon-based semiconductor Hall sensors in an inhomogeneous magnetic field, including 3D transport effects. In particular we discuss the automatic geometric optimization of sensor devices. The optimization strategy achieves offset reduction with simultaneous maximazation of device sensitivity. The topology optimization method changes the conductivity of a Hall plate locally, converging to an optimum conduction geometry. After showing representative results, we discuss currently available commercial and experimental software tools and their capabilities.

Dieser Artikel gibt einen Überblick über die Modellierung von Magnetfeld-Mikrosensoren hinsichtlich Offset. Wir diskutieren die automatische Offsetverminderung bei gleichzeitiger Maximalisierung der Empfindlichkeit. Nach Vorstellung repräsentativer Ergebnisse wird eine Liste kommerzieller und experimenteller Software und ihrer Fähigkeiten aufgestellt.

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Published Online: 2009-09-25

Published in Print: 2001-06-01

Citation Information: tm – Technisches Messen Plattform für Methoden, Systeme und Anwendungen der Messtechnik, Volume 68, Issue 6/2001, Pages 298–, ISSN (Print) 0171-8096, DOI: https://doi.org/10.1524/teme.2001.68.6.298.

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