Jump to ContentJump to Main Navigation
Show Summary Details
More options …

tm - Technisches Messen

Plattform für Methoden, Systeme und Anwendungen der Messtechnik

[TM - Technical Measurement: A Platform for Methods, Systems, and Applications of Measurement Technology
]

Editor-in-Chief: Puente León, Fernando / Zagar, Bernhard


IMPACT FACTOR 2017: 0.476

CiteScore 2017: 0.46

SCImago Journal Rank (SJR) 2017: 0.239
Source Normalized Impact per Paper (SNIP) 2017: 0.566

Online
ISSN
2196-7113
See all formats and pricing
More options …
Just Accepted

Issues

Wavelet-Filterung von fraktalen Oberflächen (Wavelet Filtering of Fractal Surfaces)

Peter Bakucz / Rolf Krüger-Sehm / Sven Schröder / Angela Duparré / Andreas Tünnermann
Published Online: 2009-09-25 | DOI: https://doi.org/10.1524/teme.2008.0876

Streulichtbasierte Messverfahren eignen sich prinzipiell sehr gut zur anwendungsnahen Charakterisierung von Oberflächen-Nanostrukturen. Kenngrößen wie die rms-Rauheit oder das Rauheitsspektrum lassen sich direkt bestimmen. Speziell bei der Anwendung auf Mikroflächen führt jedoch die Betrachtung sehr kleiner Oberflächenbereiche zu statistischen Fluktuationen der Streuverteilung und damit des Rauheitsspektrums. Durch geeignete Filterverfahren kann trotzdem das globale Rauheitsspektrum geschätzt werden, das das gesamte Ensemble gleichartiger Oberflächen repräsentiert.

Light scattering measurement techniques have proved suitable tools for the practical characterization of surface nanostructures. Characteristics such as rms roughness and roughness power spectrum can be directly determined. However, for applications like micro-surfaces, the investigation of very small surface areas results in statistical fluctuations of the scattering distribution and hence of the roughness spectra. If appropriate filtering is applied, the global roughness spectrum, which represents the entire ensemble of similar surfaces, can nevertheless be estimated.

Keywords: Roughness; PSD; light scattering; fractals; wavelet-filtering

About the article

Published Online: 2009-09-25

Published in Print: 2008-05-01


Citation Information: tm - Technisches Messen, Volume 75, Issue 5/2008, Pages 339–345, ISSN (Print) 0171-8096, DOI: https://doi.org/10.1524/teme.2008.0876.

Export Citation

Citing Articles

Here you can find all Crossref-listed publications in which this article is cited. If you would like to receive automatic email messages as soon as this article is cited in other publications, simply activate the “Citation Alert” on the top of this page.

[1]
Sven Schröder, Tobias Herffurth, Holger Blaschke, and Angela Duparré
Applied Optics, 2011, Volume 50, Number 9, Page C164

Comments (0)

Please log in or register to comment.
Log in