Jump to ContentJump to Main Navigation
Show Summary Details
More options …

tm - Technisches Messen

Plattform für Methoden, Systeme und Anwendungen der Messtechnik

[TM - Technical Measurement: A Platform for Methods, Systems, and Applications of Measurement Technology
]

Editor-in-Chief: Puente León, Fernando / Zagar, Bernhard


IMPACT FACTOR 2018: 0.594

CiteScore 2018: 0.54

SCImago Journal Rank (SJR) 2018: 0.261
Source Normalized Impact per Paper (SNIP) 2018: 0.563

Online
ISSN
2196-7113
See all formats and pricing
More options …
Volume 84, Issue 7-8

Issues

Simulation of microscopic metal surfaces based on measured microgeometry

Simulation mikroskopischer Metalloberflächen unter Verwendung von gemessenen Mikrogeometrien

Haiyue Yang
  • Corresponding author
  • Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart Germany
  • Universität Stuttgart, Graduate School of Excellence advanced Manufacturing Engineering (GSaME), Allmandring 35, 70569 Stuttgart Germany
  • Email
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Tobias Haist
  • Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart Germany
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Marc Gronle
  • Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart Germany
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
/ Wolfgang Osten
  • Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart Germany
  • Other articles by this author:
  • De Gruyter OnlineGoogle Scholar
Published Online: 2017-04-07 | DOI: https://doi.org/10.1515/teme-2017-0019

Abstract

Lack of training data is one of the main problems when realizing optical surface inspection systems. In the best case, provision of enough representative training samples is difficult and most of the time expensive. In some cases, it is not possible at all. Here we present an alternative method where the surface defects are simulated. Thereby, we focus on metal surfaces in the microscale where diffraction phenomena start to play a major role. Ray tracing and scalar diffraction approximation methods are applied and compared.

Zusammenfassung

Bei der Entwicklung von optischen Oberflächeninspektionssystemen sind fehlende Trainingsdaten eines der Hauptprobleme. Im besten Fall ist die Gewinnung von repräsentativen Trainingsbeispielen schwierig und teuer, in einigen Fällen jedoch überhaupt nicht möglich. In diesem Beitrag stellen wir einen alternativen Ansatz vor, durch den Oberflächendefekte simuliert und dadurch virtuelle Testdaten generiert werden. Der Schwerpunkt liegt dabei auf Metalloberflächen mit Strukturen im mikroskopischen Bereich, bei denen Streulichteffekte eine wichtige Rolle spielen. Raytracing und zwei skalare Beugungsrechnungsmethoden werden angewandt und verglichen.

Keywords: Simulation; microscale; BRDF; GPU; ray tracing; scalar diffraction approximation method; parabasal TEA; LPIA

Schlagwörter: Simulation; Mikroskala; BRDF; GPU; Ray tracing; Skalare Beugungsrechnungsmethode; Parabasal TEA; LPIA

About the article

Haiyue Yang

Haiyue Yang received his Master of Science in Photonics from the Friedrich-Schiller-University Jena in 2011. From 2011 to 2013, he was employed at the Institute for Applied Materials (IAM) at Karlsruhe Institute of Technology (KIT) as research assistant. From 2014 he is a PhD student in Institute of Applied Optics at University of Stuttgart. His main research interests are multi-sensor optical systems and microscopic simulation.

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany and Universität Stuttgart, Graduate School of Excellence advanced Manufacturing Engineering (GSaME), Allmandring 35, 70569 Stuttgart, Germany

Tobias Haist

Tobias Haist studied physics and obtained his PhD in engineering at the University of Stuttgart. Currently he is leading the group “active optical systems” at the Institute of Applied Optics (ITO) where he is working on new applications for spatial light modulators. His main research interests are optical and digital image processing, computer-generated holography and optical measurement systems.

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany

Marc Gronle

Marc Gronle received his Diploma in Mechatronics from the University of Stuttgart in 2011. Since Mai 2011 he is employed at the Institute of Applied Optics (ITO) at University of Stuttgart as research assistant. From October 2014 on, he is heading the group of 3D metrology. His research work is focused on multi-sensor optical systems, 3D view and automatic measurement planning as well as sensor technologies and image processing for 3D metrology. Furthermore, he is leading the development team for the open source lab automation and measurement software itom.

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany

Wolfgang Osten

Prof. Wolfgang Osten received the Diploma in Physics from the Friedrich-Schiller-University Jena in 1979 and in 1983 the PhD degree from the Martin-Luther-University Halle-Wittenberg for his thesis in the field of holographic interferometry. From 1984 to 1991 he was employed at the Central Institute of Cybernetics and Information Processes in Berlin making investigations in digital image processing and computer vision. In 1991 he joined the Bremen Institute of Applied Beam Technology (BIAS) to establish the Department Optical 3D-Metrology. Since September 2002 he has been a full professor at the University of Stuttgart and director of the Institute for Applied Optics. His research work is focused on new concepts for industrial inspection and metrology by combining modern principles of optical metrology, sensor technology and image processing. Special attention is directed to the development of resolution enhanced technologies for the investigation of micro and nano structures.

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany


Revised: 2017-03-07

Accepted: 2017-03-21

Received: 2017-02-14

Published Online: 2017-04-07

Published in Print: 2017-08-28


Citation Information: tm - Technisches Messen, Volume 84, Issue 7-8, Pages 493–501, ISSN (Online) 2196-7113, ISSN (Print) 0171-8096, DOI: https://doi.org/10.1515/teme-2017-0019.

Export Citation

©2017 Walter de Gruyter Berlin/Boston.Get Permission

Comments (0)

Please log in or register to comment.
Log in