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tm - Technisches Messen

Plattform für Methoden, Systeme und Anwendungen der Messtechnik

[TM - Technical Measurement: A Platform for Methods, Systems, and Applications of Measurement Technology
]

Editor-in-Chief: Puente León, Fernando / Zagar, Bernhard


IMPACT FACTOR 2018: 0.594

CiteScore 2018: 0.54

SCImago Journal Rank (SJR) 2018: 0.261
Source Normalized Impact per Paper (SNIP) 2018: 0.563

Online
ISSN
2196-7113
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Volume 84, Issue s1

Issues

Scanning confocal vibrometer microscope for vibration analysis of energy-harvesting MEMS in wearables

Scannendes konfokales Vibrometermikroskop für die Schwingungsanalyse von Energy-Harvesting-Microsystemen für Wearables

Robert Kowarsch
  • Corresponding author
  • Clausthal University of Technology, Institute of Electrical Information Technology, Department of Applied Metrology, Leibnizstraße 28, 38678, Clausthal - Zellerfeld, Germany
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/ Jürgen Janzen
  • Clausthal University of Technology, Institute of Electrical Information Technology, Department of Applied Metrology, Leibnizstraße 28, 38678, Clausthal - Zellerfeld, Germany
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/ Christian Rembe
  • Clausthal University of Technology, Institute of Electrical Information Technology, Department of Applied Metrology, Leibnizstraße 28, 38678, Clausthal - Zellerfeld, Germany
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/ Hyunjun Cho
  • California Institute of Technology, Department of Electrical Engineering, B113 Moore Laboratory, MC 136-93,, Pasadena , CA 91125, United States of America
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/ Hyuck Choo
  • California Institute of Technology, Department of Electrical Engineering, B113 Moore Laboratory, MC 136-93,, Pasadena , CA 91125, United States of America
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Published Online: 2017-09-20 | DOI: https://doi.org/10.1515/teme-2017-0042

Abstract

We present a scanning confocal laser-Doppler vibrometer microscope for sensitive, contactless measurement of microelectromechanical systems (MEMS). This systems enables the dynamic analysis up to 3.2 MHz with a lateral resolution of few micrometers. We show measurements on developed MEMS for vocal-energy harvesting in wearables and medical implants. For efficient harvesting a cantilever beam with a serpentine form was designed with a fundamental resonance at 200 Hz. We verified the simulated mode shapes with our vibration measurements. The observed deviations in resonance frequencies between simulation and measurement are due to modelling and manufacturing dissimilarities.

Zusammenfassung

Wir stellen ein scannendes konfokales Laser-Doppler-Vibrometermikroskop für die empfindliche und berührungslose Messung von Mikrosystemen vor. Unser System erlaubt die dynamische Analyse der Bauteile bis zu einer Frequenz von 3.2 MHz bei einer lateralen Auflösung von wenigen Mikrometern. Wir zeigen Messungen an entwickelten Mikrosystemen zum Energie-Harvesting aus Stimmanregung für Wearables und medizinische Implantate. Für das effiziente Harvesting wurde ein serpentinenförmiger Cantilever entwickelt, der eine Resonanz bei 200 Hz besitzt. Wir verifizierten die simulierten Schwingformen mit unseren Schwingungsmessungen. Abweichungen der gemessenen Resonanzfrequenzen zwischen der Simulation und den Messungen sind auf Unterschiede zwischen Modell und gefertigtem Bauteil zurückzuführen.

Keywords: Laser-Doppler vibrometry; interferornetric measurernent rnicroscope; energy harvesting; MEMS; rnicrosystems; vibration analysis

Schlüsselwörter: Laser-Doppler-Vibrometrie; interferometrisches Messmikrsokop; Energy-Harvesting; MEMS; Mikrosysteme; Vibrationsanalyse

About the article

Published Online: 2017-09-20

Published in Print: 2017-09-26


Citation Information: tm - Technisches Messen, Volume 84, Issue s1, Pages 131–137, ISSN (Online) 2196-7113, ISSN (Print) 0171-8096, DOI: https://doi.org/10.1515/teme-2017-0042.

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[1]
Robert Kowarsch, Rigele Te, and Christian Rembe
Journal of Physics: Conference Series, 2018, Volume 1149, Page 012016

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