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Zeitschrift für Physikalische Chemie

International journal of research in physical chemistry and chemical physics

Editor-in-Chief: Rademann, Klaus


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2196-7156
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Volume 232, Issue 7-8

Issues

Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation

Philip Ruff
  • Eduard-Zintl-Institut für Anorganische und Physikalische Chemie, Technische Universität Darmstadt, Alarich-Weiss-Str. 8, 64287 Darmstadt, Germany
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/ Mercedes Carrillo-Solano / Nils Ulrich
  • Materials Research Department, GSI Helmholtzzentrum, Planckstr. 1, 64291 Darmstadt, Germany
  • Material- und Geowissenschaften, Technische Universität Darmstadt, Alarich-Weiss-Str. 8, 64287 Darmstadt, Germany
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/ Andrea Hadley
  • Department of Electronic Materials Engineering, Research School of Physics and Engineering, Australian National University, Canberra ACT 2601, Australia
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/ Patrick Kluth
  • Department of Electronic Materials Engineering, Research School of Physics and Engineering, Australian National University, Canberra ACT 2601, Australia
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/ Maria Eugenia Toimil-Molares / Christina Trautmann
  • Materials Research Department, GSI Helmholtzzentrum, Planckstr. 1, 64291 Darmstadt, Germany
  • Material- und Geowissenschaften, Technische Universität Darmstadt, Alarich-Weiss-Str. 8, 64287 Darmstadt, Germany
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/ Christian Hess
  • Corresponding author
  • Eduard-Zintl-Institut für Anorganische und Physikalische Chemie, Technische Universität Darmstadt, Alarich-Weiss-Str. 8, 64287 Darmstadt, Germany
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Published Online: 2018-06-12 | DOI: https://doi.org/10.1515/zpch-2017-1058

Abstract

Nanoscale structuring in confined geometries using atomic layer deposition (ALD) is demonstrated for surfaces of nanochannels in track-etched polymer membranes and in mesoporous silica (SBA-15). Suitable process conditions for conformal ALD coating of polymer membranes and SBA-15 with inorganic oxides (SiO2, TiO2, Al2O3) were developed. On the basis of the oxide-coated layers, nanochannels were further structured by a molecular-templated ALD approach, where calixarene macromolecules are covalently attached to the surface and then embedded into an Al2O3 layer. The removal of calixarene by ozone treatment results in 1–2 nm wide surface nanocavities. Surfaces exposed to different process steps are analyzed by small angle X-ray scattering (SAXS) as well as by X-ray photoelectron and infrared spectroscopy. The proposed nanostructuring process increases the overall surface area, allows controlling the hydrophilicity of the channel surface, and is of interest for studying water and ion transport in confinement.

Keywords: atomic layer deposition; confined geometry; hydrophilicity; mesoporous silica; nanocavity; nanoscale structuring; track-etched polymer membrane

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About the article

Received: 2017-10-17

Accepted: 2018-01-18

Published Online: 2018-06-12

Published in Print: 2018-07-26


Citation Information: Zeitschrift für Physikalische Chemie, Volume 232, Issue 7-8, Pages 1147–1171, ISSN (Online) 2196-7156, ISSN (Print) 0942-9352, DOI: https://doi.org/10.1515/zpch-2017-1058.

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