Ion-induced damage and annealing of silicon. Molecular dynamics simulations

David Humbird 1  and David B. Graves 1
  • 1 University of California at Berkeley, Berkeley, CA 94720, USA

A study of the interactions of energetic argon ions with silicon surfaces using molecular dynamics simulations is reported. A dynamic balance between ion-induced damage and recrystallization of the surface is detected. By manipulating ion energy, argon ions are able to both create disordered regions near the surface, and recrystallize these disordered regions.

If the inline PDF is not rendering correctly, you can download the PDF file here.


Journal + Issues