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Zhang, Jie

Wafer Fabrication

Automatic Material Handling System

Together with Huazhong University of Science and Technology

    119,95 € / $137.99 / £109.00*

    eBook (EPUB)
    Publication Date:
    September 2018
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    • Presents mathematical foundations of intelligent manufacturing system.
    • Explores dispatch methods at local and system level.
    • Illustrates theories via case studies.

    Aims and Scope

    This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.


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    Jie Zhang, Shanghai Jiaotong University, Shanghai, China


    Table of content:
    Chapter 1 Wafer fabrication system-semiconductor manufacturing, process, manufacturing system, machining system, dispatch
    Chapter 2 Automatic Materiel Handling System (AMHS) in wafer fabrication-development, sub-systems, layout, features
    Chapter 3 AMHS modeling-modeling based on network flow, queueing theory, Mathematical Programming model, Markov model, Simulation Model, Petri network model
    Chapter 4 AMHS performance analysis-description of the running of AMHS, frequently-used analytical methods, extended Markov model, performance analysis based on extended Markov model
    Chapter 5 AMHS dispatch-dispatch based on Heuristic Rules, operational research, intelligent algorithm
    Chapter 6 Dispatch of Interbay handling system-methods, model, structure, dispatch based on Complex Heuristic Rules
    Chapter 7 Dispatch of Intrabay handling system-dispatch based on GDP, Push-Pull theory
    Chapter 8 Dispatch at system level-dispatch based on PMPGA, GARL Complex Heuristic Rules
    Chapter 9 Performance and evaluation-system performance modeling, modeling based on AOKCTP, performance analysis, case studies

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