Automatic Materiel Handling System
Together with Huazhong University of Science and Technology
- Presents mathematical foundations of intelligent manufacturing system.
- Explores dispatch methods at local and system level.
- Illustrates theories via case studies.
Aims and Scope
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
Chapter 1 Wafer fabrication system-semiconductor manufacturing, process, manufacturing system, machining system, dispatch
Chapter 2 Automatic Materiel Handling System (AMHS) in wafer fabrication-development, sub-systems, layout, features
Chapter 3 AMHS modeling-modeling based on network flow, queueing theory, Mathematical Programming model, Markov model, Simulation Model, Petri network model
Chapter 4 AMHS performance analysis-description of the running of AMHS, frequently-used analytical methods, extended Markov model, performance analysis based on extended Markov model
Chapter 5 AMHS dispatch-dispatch based on Heuristic Rules, operational research, intelligent algorithm
Chapter 6 Dispatch of Interbay handling system-methods, model, structure, dispatch based on Complex Heuristic Rules
Chapter 7 Dispatch of Intrabay handling system-dispatch based on GDP, Push-Pull theory
Chapter 8 Dispatch at system level-dispatch based on PMPGA, GARL Complex Heuristic Rules
Chapter 9 Performance and evaluation-system performance modeling, modeling based on AOKCTP, performance analysis, case studies